PRODUCTION OF LAMINAR MAGNETIC FILMS Russian patent published in 2016 - IPC C23C14/34 G11B5/66 B82B3/00 

FIELD: process engineering.

SUBSTANCE: invention relates to production of laminar magnetic films and can be used for fabrication of media for data recording or in production of transducers. Claimed process comprises the ion-plasma deposition of at least two plies of one magnetic material and spacer arranged there between and made of magnetic material other than the first one. Note here that the main plies are produced from magnetically soft material in depth not exceeding that of supercritical state origination. Spacer material is selected by selection of magnetic materials. Absolute magnitude of the exchange interaction integral of said materials is lower than that of the main plies. Said materials are ranked by the decrease in said parameter, deposition of spacers is performed of materials with preset steps of measurement of coercive force H_f. Obtained magnitudes with preset coercive force H_f for magnetic materials are compared. Ranked materials selection step is decreased. Processes of deposition, measurement of coercive force H_f and comparison with preset magnitude are reiterated. The deposition of said spacer is performed with material of coercive force H_f corresponding to preset magnitude.

EFFECT: enhanced process efficiency, time saving.

1 tbl, 3 dwg