LASER PROCESSING OF NON-METALLIC PLATES Russian patent published in 2016 - IPC H01L21/42 

FIELD: metallurgy.

SUBSTANCE: claimed process consists in irradiation of plate surface by pulse laser radiation and measurement of the plate depth h and plate material absorption index χ in the laser radiation wavelength. Dimensionless parameters χh are calculated and, given χh<4, the initial laser beam is split to two equal-energy beams to affect both plate surface at the energy density defined by the relationship: , where T_ƒ is the annealing temperature; T₀ is the initial temperature; c and ρ are specific heat capacity and plate material density, respectively; R is the material reflection factor; χ is the absorption index of the plate material in the laser radiation wavelength; e is the natural logarithm base.

EFFECT: lower power input, higher yield.

2 dwg