METHOD OF LASER PROCESSING OF NON-METALLIC PLATES Russian patent published in 2019 - IPC H01L21/08 H01L21/324 H01L21/428 B23K26/352 G01N25/72 

FIELD: technological processes.

SUBSTANCE: invention relates to technological processes and can be used for laser annealing of plates of semiconductor, ceramic and glass-like materials. In the method of laser processing of non-metallic plates, consisting in irradiation of their surface with laser radiation pulse with energy density, depending on annealing temperature, initial temperature of plate, specific heat capacity and density of material of plate, as well as the plate material absorption factor at the laser radiation wavelength, the plate is preheated to a certain temperature.

EFFECT: elimination of destruction of plates by thermoelastic stresses during processing and increase of yield of suitable plates.

1 cl, 1 dwg