METHOD FOR LASER ANNEALING OF NON-METALLIC PLATES Russian patent published in 2017 - IPC H01L21/42 

FIELD: physics.

SUBSTANCE: in the method of laser processing of non-metallic plates, consisting in the irradiation of their surface by a laser pulse with an energy density which depends on the annealing temperature, the initial plate temperature, the specific heat and density of the plate material, as well as on the absorption index of the plate material at the wavelength of the laser radiation and returning back to the plate with the help of a dielectric radiation mirror, which released through its rear surface, the condition of the thermal resistance of the plate is precalculated, and if its not fulfilled, the plate is heated to a temperature which depends on the plate thickness, mechanical, thermal-physical and optical properties of the plate material before the laser pulse exposure.

EFFECT: providing the possibility of eliminating the plate destruction by thermoelastic stresses during processing and increasing the yield of suitable plates.

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