METHOD OF LASER PROCESSING OF NON-METALLIC PLATES Russian patent published in 2017 - IPC H01L21/42 

FIELD: physics.

SUBSTANCE: in the method of laser processing of nonmetallic plates, consisting in the irradiation of their surface by a laser pulse with an energy density that depends on the annealing temperature, the initial plate temperature, the specific heat and density of the plate material, and the absorption index of the plate material at the wavelength of the laser radiation, the criterion of the thermal resistance of the plate is calculated and, when it is not fulfilled, before heating the laser pulse, the plate is heated to a temperature depending on the thickness of the plate, mechanical, thermophysical and optical properties of the plate material.

EFFECT: providing the possibility of eliminating the destruction of plates by thermoelastic stresses during processing and increasing the yield of suitable plates.

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