METHOD OF LASER PROCESSING NON-METALLIC PLATES Russian patent published in 2017 - IPC H01L21/42 B23K26/00 G01N25/72 

FIELD: physics.

SUBSTANCE: method for laser processing the non-metallic plates is proposed, consisting in measuring the plate thickness h and the absorption index χ of the plate material at the wavelength of the laser radiation, in calculating the dimensionless parameter χh and subject to χh<4 of the initial laser beam separation into two beams of equal energy and simultaneously acting on both surfaces of the plate with the energy density determined by the equation relating the annealing temperature of the plate, its initial temperature, specific heat and density of the plate material, the reflection coefficient of the plate material, the thickness of the plate and the absorption index of the plate material at the wavelength of the laser radiation. The condition for the thermal resistance of the plate is preliminarily calculated and, if it is not fulfilled, before the laser pulse, the plate is heated to a temperature that depends on the thickness of the plate, the mechanical, thermal, and optical properties of the plate material.

EFFECT: eliminating the destruction of plates by thermoelastic stresses during processing and increasing yield of the suitable plates.

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