METHOD OF MANUFACTURING A FIELD EMISSION CATHODE MULTI-TIPPED CARBON MATERIAL ON A CURVED SURFACE Russian patent published in 2016 - IPC H01J1/304 

FIELD: electronic equipment.

SUBSTANCE: invention relates to electronic equipment, in particular to the production of carbon multi-tipped field emission cathodes used in vacuum devices with microsecond availability time. Using laser emission on the curved surface of the cathode disc a matrix of microtips is shaped where the focus of the laser beam moves over the surface of the cathode disk in the engraving process which is carried out by rotating the cathode disc around the center of curvature of its surfaces, that is the focus of the laser beam during engraving always stays on the curved surface of cathode disk and the optical axis of the laser beam coincides with the radius of curvature of the disk surface at any point. This process forms tapered microtip, the axis of symmetry of each are directed along the radius of curvature of the surface. Method of manufacturing multi-tipped cathode out of carbon material creates an electron gun for microwave amplifiers O-type (TWM, klystron, etc.). Cold cathode microsecond available time, increased 4÷5 % efficiency and service life of devices 150,000 hours.

EFFECT: technical result is an increase in the current density in the beam cross section and a laminar electron beam 10 times or more compared with the current density directly on the surface of a field emission cathode.

2 cl, 2 dwg