METHOD OF FORMING SUPERCONDUCTING THIN FILM WITH LOCAL REGIONS OF VARIABLE THICKNESS Russian patent published in 2016 - IPC H01L39/24 

FIELD: electricity.

SUBSTANCE: invention can be used to form in superconducting thin films of areas with required values of critical current density. This invention consists in that the method of forming areas of variable-depth superconducting thin film by laser sputtering YBa₂Cu₃O_7-x, where between the target and the substrate is placed shadowing plate, then target laser radiation power density Ρ=(1÷2)·10⁹ W/cm², wavelength λ=1.06 MCM, pulse duration τ=10÷20 ns and pulse repetition frequency ν=10 Hz for time t=175÷185 s at a temperature of target T_m= 600÷700°c, substrate temperature T_u=800÷840°C, distance between the substrate and shading plate L=0.1÷0.2 mm, at that outside the shading plate a superconducting film thickness D₂=160÷200 nm with critical current density j>10⁶ A/cm², and under the shading plate a superconducting film thickness D₂=40-50 nm with critical current density j=(1÷5)·10³ A/cm².

EFFECT: simplified technology of producing microbridges of superconducting film with required values of critical current.

1 cl, 3 ex, 4 dwg