DEVICE FOR FORMING MULTICOMPONENT AND MULTILAYER COATINGS Russian patent published in 2018 - IPC C23C14/00 C23C14/56 C23C14/34 H01J37/317 

FIELD: physics.

SUBSTANCE: invention relates to the device for forming multicomponent and multilayer coatings and can be used in the automotive industry, in medicine when creating protective and biocompatible layers of dental and orthopedic implants, for manufacturing thin-film integrated batteries and in chemical reactors. Vacuum chamber (1) includes the plasma arc source (2) with the magnetic system, the cathode (3) and the anode (4) with the longitudinal axis 01-02, the gas plasma source (8) with the first electromagnetic coil (9), with the second electromagnetic source coil (10) and the process gas inlet and the control system (11). Support (20) of the substrate (21) is arranged symmetrically to the axis 03-04 of the gas plasma source (8) and includes the evacuation means (30). Magnetron source (36) has the longitudinal axis 05-06. Magnetic system of the plasma-arc source (2) includes the electromagnetic coil of the plasma-arc source (5). Gas plasma source (8) is made in the form of a quartz cylinder (12) with the antenna (13), which is arranged symmetrically to the axis 03-04.

EFFECT: technical result of the invention consists in expanding the nomenclature of applied materials of a class of dielectrics and composite materials consisting of dielectrics, conductors, and also semiconductors, and in providing the possibility of applying coatings layer by layer with high speed, uniformity and adhesion.

3 cl, 1 dwg