METHOD AND DEVICE OF REPLACEMENT OF SUB-PIECES IN THE PROCESS OF PRODUCTION OF PHOTO TRANSMITTERS Russian patent published in 2017 - IPC H01L21/677 H01L21/68 

FIELD: physics.

SUBSTANCE: method for flipping substrates involves placing the first substrate holder with the seats in which the substrates are placed, on the turntable by a loading mechanism, a second substrate holder is mounted on top of the first substrate holder, and they are fixed to each other, then the table is rotated, then the support holders are unloaded by the unloading mechanism with subsequent separation of the substrate holders in such a way that the plates remain on the second substrate holder for subsequent processing and application of the layer in the second side of the substrates. Loading and unloading of substrates is carried out in manual mode using a podcast stage or in an automatic - using a manipulator. The device for turning the substrates contains a mechanism for loading and/or unloading, a turntable mounted on the frame with the help of the swivel mechanism hinges, two substrate holders are mounted on the table, connected together by means of locks.

EFFECT: increased productivity, reduced contact of substrates with foreign objects when flipping substrates and improving the quality of substrates.

4 cl, 1 dwg