ROTATABLE SUBSTRATE CONTAINER WITH A MASK FOR FORMING THIN FILMS OF VARIOUS CONFIGURATIONS Russian patent published in 2023 - IPC C23C14/02 C23C14/50 

FIELD: mechanics.

SUBSTANCE: rotary container comprises a flat plate with an alignment column and a mask. The flat plate is connected by a connecting rod to the mask. In said plate, a seat is made in the form of a cell for placing the substrate, inside which a through groove of the window for spraying the substrate is concentrically made. The seat is covered with a locking cap. The mask is a titanium plate of a round shape with four windows and has four alignment columns located at the positions of these windows. The flat plate is configured to move relative to the mask and positioning the seat with the substrate over the given mask window by arranging the flat plate alignment column and the mask alignment column corresponding to the given mask window in one line.

EFFECT: obtaining thin films with a given configuration within one process cycle.

1 cl, 3 dwg