FIELD: electricity.
SUBSTANCE: high-frequency radiation generator based on a hollow cathode discharge contains a gas-discharge chamber formed by hollow cathode and anode electrodes, a power source and an electric load are connected to the electrodes of the chamber, and a system for creating a gas-discharge medium is connected to the chamber. As a gas forming a gas-discharge medium, a gas with a higher molecular binding energy than that of oxygen is used. In particular, in the embodiment of the generator, the gas SF6 (sulfur hexafluoride) is used as the gas forming the gas-discharge medium.
EFFECT: increase in the radiation power of an RF generator based on a hollow cathode discharge by increasing the value of the hollow cathode discharge voltage realized in a gas-discharge chamber of a high-frequency generator by using a working gas in which the efficiency of producing charged particles is less than that of air.
2 cl, 1 dwg
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