TARGET FOR DISPENSER CATHODE BASED ON BARIUM SCANDE Russian patent published in 2017 - IPC C23C14/08 C23C14/34 H01J1/142 

FIELD: chemistry.

SUBSTANCE: invention relates to the field of manufacturing dispenser cathodes based on barium scandate or other materials based on barium scandate, namely, to the target material and target for physical deposition of thin films, to a dispersed cathode based on barium scandate and the method of its preparation and method of obtaining the target. The target (66) contains a mixture or consists of a mixture of barium oxide BaO, calcium oxide CaO, aluminium oxide Al₂O₃ and scandium oxide Sc₂O₃. Molar ratio of BaO:CaO:Al₂O₃:Sc₂O₃ is "b:c:x:y" while 2≤b≤5, 1≤c≤3, 2≤x+y≤b+c and 0,1≤y≤1. Way of getting the cathode includes formation of porous shell, impregnated with barium compound and scandium, obtaining intermediate layer of BaO, CaO, Al₂O₃ and Sc₂O_3. Way of getting the target includes getting a mixture of BaO, CaO, Al₂O₃ and Sc₂O₃ and sintering or melting the mixture with the formation of the target.

EFFECT: destabilizing effect reactions BaO and CaO oppose using more inert components Sc₂O₃ and also Al₂O₃, with high content of scandium oxide not only stabilizes material but with increased content of aluminium oxide improves stability.

13 cl, 3 dwg