METHOD OF OBTAINING SENSITIVE MATERIAL FOR A GAS SENSOR ON A SAPPHIRE SUBSTRATE Russian patent published in 2017 - IPC G01N27/12 

FIELD: physics.

SUBSTANCE: invention is used to produce a gas sensitive material that is based on titanium dioxide deposited on a sapphire substrate and is designed to record the content of microimpurities of carbon monoxide and oxygen. A method for producing a gas sensitive material on a sapphire substrate, comprising the step of forming a gas sensitive material on a sapphire substrate by centrifugation from a film-forming solution of titanium tetraisopropoxide, which is then subjected to drying and annealing. The gas sensitive material is subjected to laser annealing using pulsed solid-state Nd: YAG laser radiation with a wavelength of 1064 nm, a pulse duration of 50-100 ns, and an average power of 80-100 W.

EFFECT: possibility of improving the quality of the crystal structure and the stability of the gas sensitive characteristics of the film of a gas sensitive material by modifying its crystal and defect structure during the laser annealing process.

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