SIMULTANEOUS FORMING OF THIN YBaCuO FILMS ON TWO-SIDED DIELECTRIC SUBSTRATES Russian patent published in 2015 - IPC H01L39/24 

FIELD: process engineering.

SUBSTANCE: invention relates to forming of superconducting films on both surfaces of dielectric substrates. Invention allows production of uniform-depth superconducting films on both surfaces of the substrate in single process cycle. In forming of superconducting film structures from YBaCuO on both surfaces of the substrate by laser ablation process, substrate is revolved so that its every surface faces in turn the YBa₂Cu₃O₇ target for 5÷7 second at 25-30 mm from the target.

EFFECT: production of uniform-depth superconducting YBaCuO films on both surfaces of the substrate in single process cycle.

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