FIELD: measuring equipment.
SUBSTANCE: sensor consists of a semiconductive foundation (1) made in the form of a polycrystalline film of solid solution (GaAs)0.75 (ZnSe)0.25, and the substrate, which the electrode pad (2) of the piezoquartz resonator (3) serves.
EFFECT: invention makes it possible, with a significant simplification of the sensor manufacturing technology, to determine the content of ammonia with a sensitivity several times higher than the sensitivity of known sensors.
3 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| TRACE AMMONIA SENSOR | 2023 |
|
RU2797767C1 |
| AMMONIA TRACE CONTAMINANT SENSOR | 2017 |
|
RU2652646C1 |
| TRACE AMMONIA SENSOR | 2021 |
|
RU2772443C1 |
| NANOSEMICONDUCTOR GAS SENSOR | 2013 |
|
RU2530455C1 |
| MICROIMPURITIES OF AMMONIA SENSOR | 2019 |
|
RU2700035C1 |
| AMMONIA TRACE SENSOR | 2020 |
|
RU2743155C1 |
| AMMONIA TRACE CONTAMINANT DETECTOR | 2008 |
|
RU2400737C2 |
| AMMONIA SEMICONDUCTOR SENSOR | 2015 |
|
RU2613482C1 |
| SEMICONDUCTOR GAS SENSOR | 2005 |
|
RU2281485C1 |
| PIEZORESONANT GAS HUMIDITY SENSOR | 1998 |
|
RU2141639C1 |
