FIELD: gas analysis.
SUBSTANCE: invention relates to the field of gas analysis, in particular to detection devices used to register and measure the content of trace ammonia. The ammonia microimpurity sensor contains a semiconductor base and a substrate, while the semiconductor base is made of a polycrystalline film of a solid solution of composition (CdS)0.67(CdTe)0.33 deposited on a substrate made in the form of an electrode pad of a piezoelectric resonator.
EFFECT: increasing the sensitivity and manufacturability of the sensor.
1 cl, 3 dwg
Title | Year | Author | Number |
---|---|---|---|
MICROIMPURITIES OF AMMONIA SENSOR | 2019 |
|
RU2700035C1 |
AMMONIA TRACE SENSOR | 2020 |
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RU2607733C1 |
AMMONIA TRACE CONTAMINANT DETECTOR | 2008 |
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RU2400737C2 |
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|
RU2631009C2 |
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|
RU2281485C1 |
Authors
Dates
2022-05-20—Published
2021-09-13—Filed