FIELD: gas analysis.
SUBSTANCE: invention relates to gas analysis, in particular to detecting devices used for recording and measuring content of ammonia trace impurities, and can be used for environmental monitoring. Sensor includes a semiconductor base and a substrate. Semiconductor base is made of polycrystalline film of solid solution of composition (CdTe)0.8(CdS)0.2, and substrate is electrode pad piezoelectric resonator.
EFFECT: high sensitivity and manufacturability of the sensor, hence, the sensor according to the invention with considerable simplification of its manufacturing technology enables to determine content of ammonia with sensitivity several times greater than the sensitivity of known sensors.
1 cl, 3 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| TRACE AMMONIA SENSOR | 2021 |
|
RU2772443C1 |
| AMMONIA TRACE SENSOR | 2020 |
|
RU2743155C1 |
| TRACE AMMONIA SENSOR | 2023 |
|
RU2797767C1 |
| AMMONIA TRACE CONTAMINANT SENSOR | 2017 |
|
RU2652646C1 |
| AMMONIA SEMICONDUCTOR SENSOR | 2015 |
|
RU2613482C1 |
| NANOSEMICONDUCTOR GAS SENSOR | 2013 |
|
RU2530455C1 |
| SEMICONDUCTOR GAS SENSOR OF AMMONIA TRACE IMPURITIES | 2015 |
|
RU2607733C1 |
| AMMONIA TRACE CONTAMINANT DETECTOR | 2008 |
|
RU2400737C2 |
| SEMICONDUCTIVE ANALYZER OF AMMONIA | 2016 |
|
RU2631009C2 |
| SEMICONDUCTOR GAS SENSOR | 2005 |
|
RU2281485C1 |
