METHOD OF REACTIVE SPRAY Russian patent published in 2017 - IPC H01J37/34 

FIELD: technological processes.

SUBSTANCE: by means of ion bombardment the material is knocked out from the surface of the first target and passes into gas phase. Negative impulse voltage is applied to the target in such a way that electric current appears on the target surface with current density of more than 0.5 A/cm², so that the material passing into the gas phase is at least partially ionized and reactive gas stream is created in it, reactive gas reacts with the material of the target surface. The duration of voltage pulse is selected such that during the voltage pulse the target surface, in place or places at which the current flows, are most of the time at least partially covered by the reactive gas mixture with target material, and, therefore, the target surface is in the first intermediate state, and this coating at the end of voltage pulse is smaller than at the beginning of voltage pulse, and, therefore, the target surface at the end of voltage pulse is in the second intermediate state.

EFFECT: increasing the stability of spraying process.

17 cl, 6 dwg