FIELD: physics.
SUBSTANCE: manipulator device comprises a planar substrate comprising a grating with through holes in the plane of the substrate, each of these through holes being arranged to pass through, at least, one elementary beam of charged particles. Each of the through holes is provided with one or more electrodes arranged around the through hole and an electronic control circuit for providing control signals to one or more electrodes of each through hole. The electronic control circuit is arranged to provide one or more electrodes of each individual through hole with, at least, a substantially adjustable analog voltage.
EFFECT: improving the quality and productivity of lithography.
36 cl, 9 dwg
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