FIELD: chemistry.
SUBSTANCE: unit includes a plasma generator and a guide body. The plasma generator includes a chamber (2), in which a plasma can be formed. The chamber has an inlet (5) for receiving the introduced gas and one or more outlets (6) for removing, at least, one of the plasma and the radicals created therein. The guide body is hollow and configured to direct the radicals formed in the plasma to a region or volume, in which the deposition of contamination is to be removed. The chamber inlet is connected to a pressure device (40) to provide pulsating pressure in the chamber so as to create a flow in the guide body.
EFFECT: increasing the removal efficiency of contaminants.
21 cl, 13 dwg
