MULTI-ELECTRODE COOLED CONSTRUCTION Russian patent published in 2018 - IPC H01J37/317 

FIELD: physics.

SUBSTANCE: collimator electrode used in the charged particle beam generator comprises an electrode body (81), which is provided with a central aperture (82), wherein the electrode body defines an electrode height between two opposite major surfaces and contains a cooling channel (105) within the electrode body for carrying cooling fluid (102). The electrode body preferably has a disc shape or a flattened annular shape. The invention further relates to a bag of collimator electrodes for use in a charged particle beam generator comprising the first collimator electrode and the second collimator electrode that are provided with a cooling channel (105) for carrying cooling fluid (102) and a connecting channel (110) for fluid connection between the cooling channels of the first and the second collimator electrodes.

EFFECT: providing thermomechanical stability for strong beam currents and under conditions of strong electric fields.

29 cl, 15 dwg