FIELD: physics.
SUBSTANCE: collimator electrode used in the charged particle beam generator comprises an electrode body (81), which is provided with a central aperture (82), wherein the electrode body defines an electrode height between two opposite major surfaces and contains a cooling channel (105) within the electrode body for carrying cooling fluid (102). The electrode body preferably has a disc shape or a flattened annular shape. The invention further relates to a bag of collimator electrodes for use in a charged particle beam generator comprising the first collimator electrode and the second collimator electrode that are provided with a cooling channel (105) for carrying cooling fluid (102) and a connecting channel (110) for fluid connection between the cooling channels of the first and the second collimator electrodes.
EFFECT: providing thermomechanical stability for strong beam currents and under conditions of strong electric fields.
29 cl, 15 dwg
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Authors
Dates
2018-02-12—Published
2014-11-14—Filed