FIELD: substrates attaching.
SUBSTANCE: invention relates to methods for attaching flexible metal substrates to a water-cooled substrate holder, it can be used for spraying thin membranes that are sensitive to heat. The substrate is made flexible with a large bending radius, convex towards the surface of a flat water-cooled substrate holder and with a deflection arrow towards the flow of the sprayed material. The flexible substrate is placed on the surface of a flat water-cooled substrate holder and pressed along the edges with removable side slats and flat springs in the form of an arc. For even better heat removal from the substrate, its surface is covered from the side of the water-cooled surface of the substrate holder with a thin layer of a low-melting alloy with a low melting temperature.
EFFECT: thin layer of the low-melting alloy solidifies after the spraying process and does not contaminate the vacuum chamber volume and the membrane, and the substrate can be used to spray the material membranes if they are separated from the substrate after the spraying process.
4 cl, 2 dwg
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