METHOD OF OBTAINING INTERMETALLIC ANTI-EMISSIVE COATING Russian patent published in 2018 - IPC C23C28/00 C23C14/06 C23C14/24 H01J19/38 

FIELD: technological processes.

SUBSTANCE: method of obtaining anti-emissive intermetallic coating Pt₃Zr on the net-shaped electrodes of powerful generator lamps includes formation of carbide layers of mesh electrode material on heat-resistant substrate, zirconium and silicon carbide zirconium, platinum surface layer and subsequent annealing of net-shaped electrode with applied combined coverage. Zirconium carbide layer is received by layer deposition of plasma flow generated when spraying zirconium cathode by vacuum arc discharge when filing the vapours of benzene, nanolayers of zirconium, zirconium carbide of variable composition and zirconium carbide with excess content of carbon phase and subsequent annealing in vacuum. Benzene vapours are fed with a spill in one pulse, providing a change in pressure from 3.3⋅10^-2 Pa to 8.7⋅10^-2 Pa.

EFFECT: obtaining a defect-free coating and increasing the operational properties of the produced instruments.

3 dwg, 1 ex