NANOCARBON MATERIAL FOR SUPPRESSION OF SECONDARY ELECTRON EMISSION AND METHOD FOR ITS PRODUCTION Russian patent published in 2022 - IPC C23C14/06 C23C14/24 H01J1/30 B82Y40/00 

FIELD: material engineering.

SUBSTANCE: invention relates to the formation of thin carbon films and can be used to obtain an anti-emission coating on the grids of high-power generator lamps. A method for obtaining a film coating with low secondary electron emission on a substrate includes deposition of a nanocarbon film coating in a microwave plasma and modification of the surface of the film coating using microwave plasma chemical treatment in a fluorocarbon gas medium at a pressure of 0.1-0.2 Pa and an accelerating potential on a substrate holder of 200-300 V. In this case, the nanocarbon film coating is deposited with a thickness of 200-500 nm in a highly ionized microwave plasma of ethanol vapor at a pressure of (1-2)∙10^-2 Pa and a substrate temperature of 200-300°C, and modification of the surface of the nanocarbon film coating by microwave plasma chemical treatment in a fluorocarbon gas medium is carried out at a pressure of 0.1-0.2 Pa for 5-8 min.

EFFECT: invention provides a decrease in the magnitude of the reverse flow of secondary electrons from the collector into the interaction space of the device, as well as an increase in the efficiency of the collector.

1 cl, 1 dwg