METHOD OF MANUFACTURING OF A STEP ALTITUDE CALIBRATION STANDARD AND A STEP ALTITUDE CALIBRATION STANDARD Russian patent published in 2018 - IPC H01L21/02 G01B7/34 

FIELD: measurement technology.

SUBSTANCE: to be used to measure the height of stepped features on smooth surfaces. Summary of the invention consists in that the method includes carrying out a thermoelectric annealing in vacuum of a substrate of a solid material by passing an electric current with resistance heating to the temperature of the activated sublimation of atoms, annealing is combined with the flow of the deposited material onto the surface of the substrate material, before annealing on the working surface of the substrate, a relief is formed with a geometry and a transverse dimension defined by an optical microscope, a recess is made in the composition of the relief, in which the side portion is located at an angle ±45° relative to the normal to the crystallographic plane of the working surface of the substrate, two support surfaces are formed by annealing in the bottom of the recess and around the recess with abutment to the edge, and in the side part of the recess by combining the annealing with the flow of the substrate material, a calibration stage and a means for determining the calibration height of the calibration stage are obtained, from a countable number of monatomic steps, step altitude calibration standard contains a pair of support surfaces on the substrate, they are arranged with respect to each other to form a calibrating step of the calibration height from a countable number of monatomic steps, one support surface is located in the bottom of the recess, the other is adjacent to the edge of the recess, in the lateral part of the recess a calibration step of the calibration height is formed from a countable amount of high density monatomic steps and a means for determining the calibration height of the calibration stage from the same countable number of monatomic steps, but of a lower density, while support surfaces are characterized by a subangstrom roughness and sufficient dimensions for optical measurements.

EFFECT: providing the possibility of increasing the width of the support surfaces, reducing the width of the calibration stage, increasing the accuracy of counting the monatomic steps in the calibration stage.

17 cl, 3 dwg