METHOD OF NANOWIRES ARRAY ON STEPPED SURFACE CuSi FORMATION Russian patent published in 2017 - IPC B82Y40/00 H01L21/20 

Abstract RU 2628220 C1

FIELD: nanotechnology.

SUBSTANCE: in conditions of ultrahigh vacuum on the preformed stepped surface of copper silicide, make the uniform single-crystal nanowires of the specified width by the metal deposition at low tilt angles in the interval of 10°÷30° to the substrate plane with the metal coating thickness equal to 20 nm.

EFFECT: provision of the possibility to create the ordered metal nanowires array with the specified geometry and the block monocrystalline structure.

5 cl, 3 dwg

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RU 2 628 220 C1

Authors

Ermakov Konstantin Sergeevich

Ognev Aleksej Vyacheslavovich

Samardak Aleksandr Sergeevich

Chebotkevich Lyudmila Alekseevna

Dates

2017-08-15Published

2016-08-11Filed