ELECTRONIC DEVICE WITH COLD EMISSION CATHODE-MESH ASSEMBLY MANUFACTURING METHOD Russian patent published in 2018 - IPC H01J1/304 

FIELD: electronic equipment.

SUBSTANCE: invention relates to electronic equipment, namely to the cathode-mesh assembly (CMA) manufacturing method, intended for use in electronic devices with cold emission. Method comprises obtaining OF a cathode and a mesh isolated from each other, with fixing of their mutual arrangement. Method features are in the fact, that in the inert gas environment arc discharge is generated between the positive electrode and the negative electrode – rod from the compressed mixture of powdered graphite and metal from the group: tungsten, molybdenum, scandium. In the process of discharge at the rod end, which is a negative electrode, creating array of the micro-tips, covered with the metal carbide insulating layer. Then stopping the arc discharge, separate from the rod, which is a negative electrode, its end part and spraying the conductive material layer onto the metal carbide insulating layer, producing a conductive substrate 21 with array of micro-tips 22 located thereon and located above it insulating 24 and conductive 25 layers. Arranging the substrate 21 in the vacuumed volume 33 containing anode 34, and forming triode, in which mesh is the conductive layer 25, and cathode is the substrate 21 with the micro-tips array 22 located thereon. Using the voltage sources 36, 40, connecting them with the positive pole to anode 34 and mesh (layer 25), respectively, and both of them by the negative pole to the cathode (substrate. 21). Then, with the source 36 maximum voltage, not causing a breakdown between the electrodes, gradually increasing the source 40 voltage, starting with zero. At that, monitoring the current in the mesh circuit and first observing this current growth, and then its decrease and stopping increasing the source 40 voltage when the current in the mesh circuit disappears or stabilizes at a minimum level as a result of the mesh structure with holes formation in the layer 25 burned through by the emitted electrons.

EFFECT: technical result is the absence of the need in the high-precision operations performing under the high temperature conditions, reduction in the control voltage required level in the CMA using electronic device, elimination of the cathode shading effect by the mesh.

24 cl, 4 dwg