METHOD AND DEVICE FOR DIRECTING NEUTRAL PARTICLES BEAM Russian patent published in 2018 - IPC H05H3/02 

FIELD: physics.

SUBSTANCE: invention relates to means for deflecting a beam of neutral particles. Invention provides for the use of an accelerating electrode located at a certain distance from the output aperture, herewith the said accelerating electrode has an aperture surrounding the initial path. Accelerating electrode and its aperture are inclined at a first angle of inclination along the first axis of inclination relative to the initial path of a gas cluster ions beam. Accelerating electrode is further electrically biased relative to the ion source to accelerate the gas cluster ions beam in the area between the ion source output aperture and the accelerating electrode aperture. First angle of inclination results in a deflection of the gas cluster ions beam from the initial path along the first deflected path. There are also drift space for the deflected gas cluster ions beam, in which the gas cluster ions are dissociated in the beam of accelerated gas cluster ions with the formation of accelerated neutral particles, and a means for separating the ions from the neutral particles to remove the ions from the path of the deflected beam, so that the accelerated neutral particles follow the path of the deflected beam in the form of a beam of neutral particles.

EFFECT: technical result is the possibility of correcting the angular beam displacement of neutral particles obtained from a gas cluster ions beam, and also the possibility of scanning the beam of neutral particles obtained from the gas cluster ions beam.

20 cl, 8 dwg