DIAGNOSTIC METHOD AND DEVICE FOR DETERMINING CHARACTERISTICS OF NEUTRAL BEAM AND CONTROL THEREOF Russian patent published in 2017 - IPC H01J37/244 H01L21/44 

Abstract RU 2610462 C2

FIELD: physics.

SUBSTANCE: proposed device and method for determining characteristics of particle beam, at which reception of particle beam is provided in central region of casing with lower pressure; exposure by received beam on impact plate for beam, which is thermally isolated from casing; impact plate temperature change is measured for beam due to measuring of beam impact, pressure change is measured in casing due to receiving of beam; and measured temperature change and measured pressure change are processed in order to determine characteristics of beam.

EFFECT: improved dosimetry to control processing of parts.

24 cl, 8 dwg

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RU 2 610 462 C2

Authors

Kirkpatrik Shon R.

Kirkpatrik Allen R.

Dates

2017-02-13Published

2012-10-25Filed