METHOD OF GAS SUPPLY TO SUPERSONIC NOZZLE OF GAS CLUSTER ION ACCELERATOR Russian patent published in 2018 - IPC H01J37/08 H05H1/24 

FIELD: manufacturing technology.

SUBSTANCE: invention relates to the field of accelerator technology, in particular to systems for supplying gas to a supersonic nozzle during the formation of accelerated gas cluster ion beams. Method provides for the formation of a gas cluster ion beam in a vacuum chamber when working gas is supplied under pressure from a source of gas to a supersonic nozzle of a gas cluster ion accelerator, while the formation of a gas cluster ion beam is carried out by pulsed gas supply from the source, with a stagnation pressure not exceeding 7 atm, and with a cluster ion current pulse duration which is 1-2 orders of magnitude greater than the duration of the gas supply from the source.

EFFECT: expansion of the class of working gases, including weakly clustered ones, used in systems for the formation of gas cluster ion beams.

1 cl, 4 dwg, 1 tbl