METHOD OF MANUFACTURING MAGNETORESISTIVE SENSOR Russian patent published in 2018 - IPC H01L43/12 

Abstract RU 2659877 C1

FIELD: manufacturing technology.

SUBSTANCE: invention relates to the field of automation and can be used in production of tachometers, displacement sensors, instruments for non-contact measurement of electric current, magnetometers, electronic compasses, and etc. Method for producing a magnetoresistive sensor comprises forming on an insulating base, vacuum deposition and photolithography methods of thin film functional sensor elements and polyimide isolation between them, applying collision protection, a Winston bridge, polyimide isolation and an inductor "offset" are formed on the insulating substrate, and the "set/reset" coil, sensor pads and alignment marks are formed on the carrier board, and central coil of the induction coil being output to a corresponding contact area of the carrier board, for which two transits are pierced and the back side of the carrier board is sprayed, and then the insulating substrate is mounted on the carrier board in accordance with the signs of alignment and digests the functional elements of the sensor on the contact areas of the carrier board.

EFFECT: simplification of manufacturing technology, increasing the reliability of the design, increasing the stability of the output voltage of the sensor.

1 cl, 3 dwg, 1 tbl

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RU 2 659 877 C1

Authors

Gusev Valentin Konstantinovich

Negin Aleksej Viktorovich

Sumskij Andrej Ivanovich

Fedorov Sergej Evgenevich

Dates

2018-07-04Published

2017-08-16Filed