FIELD: physics.
SUBSTANCE: microscope with a device includes a platform (1), a sample holder (2) with a sample (3), placed on a scanning device (4), interfaced with the platform (1), an approach unit (5), a recording system (6), consisting of a radiation source (7) and a photodetector (8), a loop-type multiple-probe sensor (9), comprising a base (10) with flexible cantilevers (15), spikes (16, 17) and a first adjustment unit (18), mounted through a second adjustment unit (19) on a grip (20) interfaced with a rotary drive (21), connected to the platform (1), as well as a control unit (30) and an angular orientation unit (25) interfaced with the grip (20).
EFFECT: high accuracy of installing flexible cantilevers relative to a recording system, high working signal-to-noise ratio, enabling operation in conditions with high vibrations, acoustic and electrical noise and convectional heat and mass exchange.
23 cl, 18 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| MULTIPLE-PROBE SENSOR OF CONTOUR TYPE FOR SCANNING PROBE MICROSCOPE | 2013 |
|
RU2592048C2 |
| MULTI-PROBE CONTOUR-TYPE SENSOR FOR SCANNING PROBING MICROSCOPE | 2003 |
|
RU2244256C1 |
| SCANNING PROBE MICROSCOPE WITH MULTIZONDE SENSOR OPERATION DEVICE | 2017 |
|
RU2695517C2 |
| MULTIFUNCTIONAL SCANNING PROBE MICROSCOPE | 2010 |
|
RU2498321C2 |
| MULTI-PROBE CONSOLE TYPE SENSOR FOR SCANNING PROBE MICROSCOPE | 2003 |
|
RU2249263C1 |
| SCANNING PROBE MICROSCOPE WITH CONTROLLED MEASUREMENT MEDIUM | 2008 |
|
RU2401983C2 |
| MULTI-PROBE MODULE FOR SCANNING MICROSCOPE | 2006 |
|
RU2306524C1 |
| SCANNING PROBE MICROSCOPE FOR INVESTIGATION OF BULK OBJECTS | 2010 |
|
RU2515731C2 |
| SCANNING PROBE MICROSCOPE FOR OPTICAL SPECTROMETRY | 2015 |
|
RU2616854C2 |
| SCANNING SOUNDING MICROSCOPE | 1997 |
|
RU2152063C1 |
