GRADIENT THIN FILMS Russian patent published in 2018 - IPC C23C16/453 C23C16/455 

FIELD: chemistry.

SUBSTANCE: invention relates to a method for producing a multilayer coating made of a thin film of a gradient composition and an article obtained by this method. Method comprises introducing at least one chemical precursor into plasma, wherein said introduction comprises introducing into the plasma a first chemical precursor and at least one other chemical precursor different from the first chemical precursor. First thin film layer is then deposited on the surface of a substrate, the chemical composition of the first thin film being determined by said at least one chemical precursor. At least one parameter of the plasma process associated with the deposition of said at least one chemical precursor is modified during deposition of the first thin film layer. Chemical composition of at least a portion of said first thin film layer is varied, independently or in combination, in a vertical direction or in a vertical and horizontal direction relative to said substrate. Layer of a second thin film obtained at least in part from the second chemical precursor is deposited on or adjacent to said first thin film, the second thin film having a chemical composition different from that of the first thin film, wherein at least a portion of the second thin film is spatially separated from the first thin film in a horizontal direction with respect to the surface of the article. Interface is provided between said first thin film and second thin film. Interface includes varying the elemental composition of the first thin film relative to the elemental composition of the second thin film. Interface extends between the vertical portion of the first thin film and the vertical portion of the second thin film relative to the surface of the article.

EFFECT: improved properties of the multilayer coating, particularly transparency, resistance to erosion, wear resistance or elasticity.

21 cl, 8 dwg, 3 tbl