DEVICE FOR PRODUCING FILMS Russian patent published in 2018 - IPC C23C14/34 C23C14/04 C23C14/54 

FIELD: technological processes.

SUBSTANCE: invention relates to the field of ion-plasma spraying of multilayer films, in particular to a device for producing multilayer films. Device comprises a shielded target cathode and a substrate holder disposed in a horizontal magnetic field. In spraying, the center of the substrate is moved by rotating from the center of one hole with the material being sprayed to the other through the action of a stepping motor controlled by the program, and the end positions above the target are set when coinciding with the position sensors installed. In this case, the position (opening or closing) of the damper is determined by the action of another controlled motor.

EFFECT: obtaining identical multilayer films with different layer properties and expanding technological capabilities.

1 cl, 2 dwg