FIELD: manufacturing technology.
SUBSTANCE: invention relates to a functional thin film that includes a hybrid organic / inorganic thin film and a metal oxide layer, as well as a method for its manufacturing. Organic / inorganic hybrid thin film of the functional thin film includes a new functional group and is formed by the molecular layering method, in which an inorganic precursor and an organic precursor are alternately used.
EFFECT: functional thin films obtained by this method can be applied in the field of nanodesign for the manufacture of semiconductors and electronic devices, chemical sensors and biosensors, in the field of development of nanotribology, surface modifications, nanoelectronic machine systems and in non-volatile memory devices.
16 cl, 19 dwg, 1 tbl
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