FIELD: electrical engineering.
SUBSTANCE: invention relates namely to a method for producing a protective coating for electronic equipment components using the atomic layer deposition method. The technical result is ensured by forming a conformal protective coating on the surface of a radio-electronic equipment unit with microwave boards by sequentially supplying trimethylaluminium vapour and water of the required dose to a heated to 200°C reactor with an inlet pulse duration of 0.2 s and a duration of removal of excess reaction products for 5 s, while these sequential operations are repeated many times until a protective coating thickness of 30 nm is obtained.
EFFECT: increasing the wear resistance and corrosion resistance of the protective coating, as well as reducing the loss of the transmitted signal.
1 cl, 4 dwg, 1 ex
| Title | Year | Author | Number |
|---|---|---|---|
| METHOD FOR PRODUCING THIN-FILM COATING BASED ON INDIUM TIN OXIDE | 2023 |
|
RU2808498C1 |
| METHOD FOR PRODUCING ALUMINUM-MOLYBDENUM OXIDE NANOFILMS BY ANHYDROUS ATOMIC LAYER DEPOSITION METHOD | 2023 |
|
RU2808961C1 |
| METHOD FOR OBTAINING MOLYBDENUM-DOPED TITANIUM DIOXIDE NANOFILMS USING ATOMIC LAYER DEPOSITION | 2022 |
|
RU2802043C1 |
| DEVICE FOR THIN FILM COATING OF SEMI-CONDUCTORS AND DIELECTRICS | 2006 |
|
RU2331717C2 |
| METHOD AND DEVICE FOR PROTECTION OF PUMP INTERIOR SURFACES USING ATOMIC LAYER COATING | 2013 |
|
RU2630733C2 |
| METHOD FOR IMPROVING GROWTH AND ADHESION OF COPPER NANOFILMS ON SILICON SUBSTRATES USING MOLECULAR LAYER DEPOSITION TECHNOLOGY | 2022 |
|
RU2800189C1 |
| METHOD OF OBTAINING SURGICAL SUTURE MATERIALS WITH ANTIBACTERIAL PROPERTIES BY ATOMIC LAYER DEPOSITION | 2022 |
|
RU2806060C1 |
| DEVICE AND METHOD OF ATOMIC-LAYER DEPOSITION OF COATING ON SUBSTRATE SURFACE | 2015 |
|
RU2704875C2 |
| METHOD OF MAKING CONDUCTIVE COATING ON SURFACE OF PROBE FOR ATOMIC FORCE MICROSCOPY | 2023 |
|
RU2825297C1 |
| SUBSTRATE STRUCTURE AND METHOD FOR MANUFACTURE THEREOF | 2013 |
|
RU2672962C2 |
