METHOD FOR OBTAINING FERROELECTRIC FILMS BaSrTiO Russian patent published in 2018 - IPC C23C14/16 

FIELD: manufacturing technology.

SUBSTANCE: method of obtaining a ferroelectric film Ba_1-xSr_xTiO₃ refers to the technology of thin films and can be used in the production of ferroelectric films Ba_1-xSr_xTiO₃ for microwave technology. At the first step the target Ba_0.4Sr_0.6TiO₃ composition is sprayed onto a sapphire substrate with a sublayer of platinum in an oxygen atmosphere at a pressure of 2 Pa and a temperature substrate of a 700–900 °C during the time enough to create a continuous ferroelectric layer. At the second step, the spraying process stops for the time, enough for the annealing of a solid ferroelectric layer, other technological parameters do not change. Then the steps are repeated several times to obtain the required thickness of the ferroelectric film.

EFFECT: technical result is a high dielectric nonlinearity of the ferroelectric film at low dielectric losses, that makes it possible to use the ferroelectric films obtained in microwave technology.

1 cl, 2 dwg