FIELD: technological processes.
SUBSTANCE: use to control the concentration of gas constituents in the atmosphere under different conditions. Summary of the invention consists in that the graphene sensor includes a dielectric substrate made of silicon carbide which is coated with a layer of graphene, a layer of graphene is obtained by sublimation of silicon carbide, contact pads are contacted with a layer of graphene at the ends, for placement of the contact areas are provided grooves made by ion-beam etching.
EFFECT: provided possibility of increasing the sensitivity of the sensor, simplified design, as well as increased service life.
4 cl, 3 dwg
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