MICROSYSTEM INDICATOR OF ELECTRIC FIELDS OF SPACE APPARATUS Russian patent published in 2018 - IPC G01R29/12 

FIELD: electrical engineering.

SUBSTANCE: usage for the manufacture of micromechanical sensors. Essence of the invention lies in the fact that the microsystem indicator of the electric fields of spacecraft includes: a) a micromechanical actuating element consisting of a substrate; rolling shielding electrode with a hole in the center; at least four elastic flexible suspensions symmetrically fixed relative to each other and the sensing electrode on the substrate and holding the movable shielding electrode; sensitive electrode formed on the substrate in the center of the hole of the movable shielding electrode, the diameter of the sensing electrode is smaller than the diameter of the opening of the movable shielding electrode; metallized tracks with contact pads on the substrate for electrical contact of the current amplifier with one end with one of four elastic flexible suspensions, and the other with a sensitive electrode; movable shielding electrode located so that the axis of symmetry of the sensing electrode is equidistant from the inner edge of the opening of the movable shielding electrode; b) inductance coil; c) current amplifier; d) analog-to-digital converter, with a movable screening electrode using an inductor coil driven in an oscillatory motion at a frequency of mechanical resonance, the sensing electrode is connected to a current amplifier, the output of a current amplifier is connected to an input of an analog-digital converter, the output of which is the output of the microsystem indicator of electric fields, which ensure the detection of the electric field intensity on the surface of the structure of the spacecraft.

EFFECT: providing the possibility of reducing the weight and size characteristics of the device.

5 cl, 5 dwg