METHOD OF OBTAINING IRON SILICIDE NANOCRYSTALS α-FeSi WITH A CHANGING PREFERRED ORIENTATION Russian patent published in 2019 - IPC C30B23/08 C30B29/52 B82B3/00 B82Y40/00 H01L21/203 

FIELD: chemistry.

SUBSTANCE: invention relates to the technology of producing nanometer-sized materials consisting of iron silicide nanocrystals α-FeSi₂ with a controllably variable preferential crystallographic orientation, shape and habit, and can be used to develop new functional elements in spintronics and nanotechnology. Method for producing iron silicide nanocrystals α-FeSi₂ with variable preferential orientation includes preliminary chemical preparation of the surface of the silicon substrate in aqueous solution of hydrofluoric acid and its purification by annealing at 840–900 °C, deposition of a gold layer on a silicon substrate by the orientation of Si (001) at room temperature by the method of thermal evaporation in ultrahigh vacuum, increase in substrate temperature to 840 °C and coprecipitation of iron and silicon with an atomic ratio of from 1:2 to 3:1.

EFFECT: technical result of the invention is the controlled production of nanocrystals α-FeSi₂ on the surface of silicon with different predominant crystallographic orientational ratios, variable cut and nanocrystal shape α-FeSi₂ for the same orientation ratio.

1 cl, 3 dwg, 1 tbl, 4 ex