DEVICE FOR SEPARATION OF COMPOSITE STRUCTURE FROM SUBSTRATE ON BASIS OF SEMICONDUCTOR FILM (OPTIONS) Russian patent published in 2019 - IPC H01L21/67 

FIELD: electrical engineering.

SUBSTANCE: use for the manufacture of semiconductor devices. Essence of the invention lies in the fact that the device for separating from the substrate a composite structure based on a semiconductor film contains a mandrel for fastening the composite structure with an epitaxial semiconductor film, rigidly connected by means of the sacrificial layer to the growth substrate, and attached to the mandrel from the side of the composite structure, means of bending the composite structure to facilitate etching of the sacrificial layer and separating from the substrate a composite structure with an epitaxial semiconductor film in a reservoir filled with etchant, while the mandrel is made in the form of a membrane carrier with one flat end surface intended for mounting the composite structure, and the second – curvilinear – for bending of the composite structure, with a thickness decreasing in the direction from the center to the periphery of the carrier membrane, and with through holes, with the diameter of the holes and their distribution over the area of the end surface with an increase in their density from the center to the periphery, together ensuring the uniformity of the clamping and preservation of the composite structure, the means of bending made in the base, the drainage tube, the stop, the corrugated bellows, the carrier membrane, in the central part of the base a through hole is formed, in which on one side of the base a drainage tube is hermetically fixed, and on the other – an emphasis consisting of a hollow leg and a convex cover connected to it, the leg of the stop is hermetically fixed in the hole of the base and provided with a through hole in the side, the carrier membrane with a curvilinear surface is oriented to the side of the base against which the stop is fixed in the hole, and installed with central part thereof relative to the stop with a gap that is eliminated when the composite structure is fixed and bent on the carrier membrane, between the carrier membrane and the base there is a corrugated bellows hermetically connected to them with the possibility of forming a device’s working volume limited by the base, bellows and carrier membrane, with the possibility of changing the pressure therein by means of an opening in the support and a drainage tube for fixing the composite structure to the carrier membrane due to the through openings of the carrier membrane and bending of the fixed composite structure and carrier membrane, the stiffness of the bellows is negligible compared to the stiffness of the carrier membrane.

EFFECT: ensuring the elimination of mechanical effects on the composite structure separated from the growth substrate, leading to elastic mechanical stresses, deformation and cracking, prevent buckling, preservation of the expanded state of the separated composite structure when detaching from the mandrel for transferring to the technological equipment fixtures, preservation of the epitaxial film.

5 cl, 9 dwg