FIELD: chemistry.
SUBSTANCE: invention can be used for modification of nanostructures of materials. Essence of the invention is that a method of modifying nanostructures of electronic materials of gas cluster ions, involving removal of any undesirable ionizing radiation from the beam of cluster ions, wherein said gas cluster ion beam is supplied in pulsed mode.
EFFECT: technical result is possibility of increasing efficiency of gas cluster ion beam accelerator.
1 cl, 1 tbl
| Title | Year | Author | Number |
|---|---|---|---|
| METHOD FOR PLANARISING NANOSTRUCTURES OF ELECTRONIC MATERIALS USING CLUSTER OF CLUSTERED GAS | 2016 |
|
RU2695028C2 |
| METHOD FOR FINISHING PLANARIZATION OF THE SURFACE OF AN OPTICAL GLASS CERAMICS | 2016 |
|
RU2646262C1 |
| METHOD FOR PROCESSING THE BEAM OF NEUTRAL PARTICLES BASED ON THE TECHNOLOGY FOR PROCESSING THE BEAM OF GAS CLUSTER IONS AND OBTAINED BY SUCH AS A PRODUCT | 2013 |
|
RU2648961C2 |
| METHOD FOR SYNTHESIS OF NANODIAMONDS AND NANOSIZED SILICON CARBIDE PARTICLES IN SILICON SURFACE LAYER | 2009 |
|
RU2393989C1 |
| METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY | 2011 |
|
RU2579749C2 |
| DRUG DELIVERY SYSTEM AND METHOD OF ITS MANUFACTURE | 2012 |
|
RU2642979C2 |
| DEVICE FOR FORMING A BEAM OF CLUSTER OR ATOMIC IONS OF GAS | 2022 |
|
RU2796652C1 |
| METHOD OF GAS SUPPLY TO SUPERSONIC NOZZLE OF GAS CLUSTER ION ACCELERATOR | 2017 |
|
RU2649883C1 |
| METHOD AND DEVICE FOR DIRECTING NEUTRAL PARTICLES BEAM | 2014 |
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RU2653581C2 |
| METHOD OF MODIFYING CARBON NANOTUBES FOR PRODUCING HYDROPHILIC OR HYDROPHOBIC SURFACES | 2018 |
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RU2707930C1 |
