DEVICE FOR COMPENSATION OF NATURAL OSCILLATIONS OF A PROBE NEEDLE OF A SCANNING MICROSCOPE Russian patent published in 2019 - IPC G01Q60/24 G01Q20/02 

FIELD: physics.

SUBSTANCE: invention relates to scanning probe technology, in particular, to monitoring the position of the probe using optical means and can be used in tunnel, atomic power, capacitive and other types of scanning probe microscopy. A device for compensating natural oscillations of a probe needle of a scanning microscope comprises a generator of a frequency signal of natural oscillations of a needle fixed on a free end of a lower surface of the console, the upper surface of which is located in the active zone of the sensor of the position of the console. Inputs of synchronous signal detectors of coordinate X and coordinate signal Y, as well as inputs of signal summators of coordinate X and coordinate signal Y are connected to outputs console position sensor. Control inputs of synchronous detectors of coordinate X signal and coordinate signal Y are connected to output of frequency generator of needle oscillation frequency. Output of synchronous detector of coordinate X signal through coordinate signal X adder is connected to input X sample movement devices, and output of synchronous detector of signal of coordinate Y through adder of coordinate signal Y is connected to input Y device for sample movement.

EFFECT: technical result observed when realizing disclosed solution consists in creation of device, allowing to compensate in real time X and Y components of the measurement signal, made by intrinsic oscillations of the probe needle, not associated with oscillations of the console.

1 cl, 1 dwg