PROBE FOR USE IN SCANNING CAPACITIVE MICROSCOPY Russian patent published in 2006 - IPC G12B21/02 

FIELD: scanning probing microscopy, in particular, engineering of systems for measuring capacity between probe and sample made of metal or semiconductor, covered in thin layer of dielectric.

SUBSTANCE: probe consists of console with needle held on one end, held on chip by other end. Probe has conductive layer, on the surface of probe on the side of needle. Conductive screen is mounted, separated from conductive layer by dielectric insert. Conductive screen and first dielectric insert may be mounted across whole surface of chip and on the surface of console, excluding the area occupied by the needle.

EFFECT: increased total sensitivity of measuring circuit without overload of its end cascades and several times decrease in influence of position of probe chip relatively to standard on measuring of value of sample-needle capacity.

6 cl, 5 dwg