METHOD OF PRODUCING Co/PbZrTiO HETEROSTRUCTURE Russian patent published in 2019 - IPC C23C14/04 B32B15/04 

FIELD: technological processes.

SUBSTANCE: invention relates to composite heterostructures having a high low-frequency magnetoelectric effect, consisting of a layer of ferromagnetic material and a ceramic ferroelectric substrate, specifically to a method of producing a layer of metallic cobalt on the surface of a ceramic of composition PbZr_0.45Ti_0.55O₃. Method of producing heterostructure Co/PbZr_0.45Ti_0.55O₃ includes smoothing of surface of ferroelectric substrate PbZr_0.45Ti_0.55O₃ with thickness of 120–200 mcm to level of roughness of not more than 20 nm and sputtering of cobalt layer with thickness of 2–4 mcm by ion-beam method. Prior to sputtering of cobalt layer, surface of substrate PbZr_0.45Ti_0.55O₃, including marking the surface with projections in the form of tapes with width of 5–7 mcm with distance between them of 12–15 mcm by method of ion-beam sputtering of aluminum mask with thickness of 1–3 mcm and etching of distance between marked projections at depth from 1 to 3 mcm.

EFFECT: heterostructures consisting of a ferromagnetic layer applied on a ferroelectric substrate are characterized by high low-frequency magnetoelectric effect.

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