DIRECT DISPLACEMENT CONVERTER FOR MICROMECHANICAL DEVICES (DISPLACEMENT SENSOR) Russian patent published in 2020 - IPC G01V7/00 G01B7/02 G01C19/56 

FIELD: measuring equipment.

SUBSTANCE: invention can be used in accelerometers or gyroscopes to measure small shifts of a test body under action of accelerations. Forward motion transducer for micromechanical devices consists of a housing and a movable part configured to move in the housing along the force direction. To measure the mutual position of the body and the movable part in the force direction, a probe and a substrate of the main tunnel microscope are mounted on them, wherein one of these elements is mounted on a carriage which is movable in a plane perpendicular to the direction of action of the force. To stabilize in this plane the mutual position of the probe and substrate of the main tunnel microscope, additional tunneling microscopes of carriage control are introduced.

EFFECT: high sensitivity of forward displacement transducer.

1 cl, 1 dwg