SPHERICAL RESONATOR MANUFACTURING METHOD Russian patent published in 2020 - IPC G01C19/56 

FIELD: instrument engineering.

SUBSTANCE: invention relates to instrument-making and can be used in designing resonators of solid-state wave gyroscopes and angular velocity sensors. In the method of making a spherical resonator, blind holes are formed in a silicon wafer from the planar side, and a glass plate is placed on the plate. First anode compound of silicon and glass plates is carried out at atmospheric pressure with sealing of blind holes, the glass plate is thinned to the specified thickness. Connected plates are heated to glass softening temperature until microspheres appear due to thermally generated pressure caused by gas expansion enclosed in sealed dead holes. Silicon plate is etched from the non-planar side with opening of blind holes. Second glass plate is placed on the silicon plate from the non-planar side and the second anode compound of the silicon plate with the glass plate is formed to form an inner vacuumised cavity. Prior to heating of connected plates they are arranged with orientation of glass plate "down", prior to etching of silicon plate there performed is stabilizing annealing at temperature below temperature of glass softening. Stabilizing annealing and heating of plates to glass softening temperature is carried out in a humid atmosphere.

EFFECT: improving metrological characteristics due to reduction of zero drift and increase of Q factor by formation of spherical resonators with shape approaching the ideal one at absence of defects of its structure.

1 cl, 6 dwg