FIELD: statistical analysis means.
SUBSTANCE: invention relates to means of statistical analysis and analysis of micro-objects, namely to counting devices (meshes, channels, pits, grooves etc.). Counting grid in the volume of the glass substrate for analysis of biological microscopic objects is formed in the volume of the glass substrate and consists of periodic micro-structured regions delimited by sections of metal doped with diffusion of impurity atoms.
EFFECT: technical result consists in providing the possibility of performing contrast-as-chemical periodic-micro-structured grids in the volume of the glass substrate with possibility of analyzing micro-objects and using high-resolution scanning electron microscopy (SEM) for these purposes, using energy-dispersive spectrometric analysis of EDS mapping, as well as possibility of their repeated use after chemical or ion-beam cleaning of surface from previously applied analyzed biological material.
1 cl, 11 dwg
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