METHOD OF MAKING A HETEROSTRUCTURE BASED ON AN ARRAY OF NANORODS OF ZINC OXIDE WITH A THIN SOLID SHELL OF TIN SULPHIDE Russian patent published in 2020 - IPC H01L21/288 B82B3/00 

FIELD: optoelectronic devices.

SUBSTANCE: invention relates to nanotechnology of multispectral photodetectors (MSPD), as well as film photoelectric converters (PEC) based on p-n-junction heterostructures, containing massif of nanostructure niobium oxide of n-type conductivity (n-(MHC-ZnO)) with extra-thin semiconductor cladding (ETSC) of p-type conductivity. Technical result is achieved due to successive cathodic pulse electrochemical deposition from aqueous electrolytes at temperatures not higher than 65 °C and duration of not more than 60 minutes first, on a high-conductivity transparent for NUR substrate n-(MHC-ZnO) with intergrowing HC-ZnO bases, having an average length of about 0.65 mcm and an average diameter of non-adherent areas near the upper ends of about 0.30 mcm, and then a solid ETSC from 100 nm thick p-SnS; further deposition by successive adsorption and ion reaction of p-CuSCN layer with thickness of 600 nm; subsequent thermo-vacuum metallization with thin-film copper through a shadow copper mask of p-CuSCN layer and high-conducting substrate surface beyond n-(MHC-ZnO), forming high-conductive epoxy contact layers over metallized areas, bonding flexible copper wire leads with epoxy high-conductive adhesive to contact layers and annealing said structure in air at 250 °C for 300 seconds. Implementation of such method of making the claimed heterostructure as a test photoconverter provides reliable reproducibility of its operation in irradiation mode AM1.5G at 25 °C with record efficiency for such photoconverters of efficiency of η6.7 %.

EFFECT: technical result is high efficiency of the disclosed heterostructure in the composition of the MSPD and the photoconverter when exposed to near ultraviolet radiation (NUR) and light from the visible spectrum, simple technology of making such a heterostructure, low power consumption and high environmental friendliness, avoiding the need to use expensive metals: platinum, gold, silver, palladium, indium, as well as graphene in elements of the design of the MSPD and photoconverter based on the considered heterostructure.

10 cl, 12 dwg